a) Overall view of the CMOS-MEMS high-frequency resonator. (b
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Design, fabrication, characterization and reliability study of
Frontiers CMOS-MEMS Thermal-Piezoresistive Resonators and
Developing Better Resonators for CMOS Technology
Mechanically coupled CMOS-MEMS free-free beam resonator arrays
CMOS-MEMS resonators and their applications
Micromachines, Free Full-Text
A chip-scale frequency down-conversion realized by MEMS-based
CMOS–MEMS resonators: From devices to applications - ScienceDirect
Design, fabrication, characterization and reliability study of
CMOS-MEMS Resonators
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